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Evaluation of multiaxial stress in textured cubic films by x-ray diffraction

Evaluation of multiaxial stress in textured cubic films by x-ray diffraction
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摘要 X-ray diffraction is used extensively to determine the residual stress in bulk or thin film materials on the as- sumptions that the material is composed of fine crystals with random orientation and the stress state is biaxial and homogeneous through the x-ray penetrating region. The stress is calculated from the gradient of ε ~ sin^2 φ linear relation. But the method cannot be used in textured films due to nonlinear relation. In this paper, a novel method is proposed for measuring the multiaxial stresses in cubic films with any [hkl] fibre texture. As an example, a detailed analysis is given for measuring three-dimensional stresses in FCC films with [111] fibre texture. X-ray diffraction is used extensively to determine the residual stress in bulk or thin film materials on the as- sumptions that the material is composed of fine crystals with random orientation and the stress state is biaxial and homogeneous through the x-ray penetrating region. The stress is calculated from the gradient of ε ~ sin^2 φ linear relation. But the method cannot be used in textured films due to nonlinear relation. In this paper, a novel method is proposed for measuring the multiaxial stresses in cubic films with any [hkl] fibre texture. As an example, a detailed analysis is given for measuring three-dimensional stresses in FCC films with [111] fibre texture.
出处 《Chinese Physics B》 SCIE EI CAS CSCD 2005年第9期1866-1872,共7页 中国物理B(英文版)
基金 Project supported by the State Key Development Program for Basic Research of China (Grant No 2004CB619302), and the National Natural Science Foundation of China (Grant No 50271038).
关键词 residual stress x-ray diffraction thin film fibre texture residual stress, x-ray diffraction, thin film, fibre texture
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