可调波长半导体激光测量台阶高度方法研究

Step Height Measurement with Tunable Diode Laser

文章在分析台阶高度测量现状和背景的基础上,着重介绍了用半导体激光器实现台阶高度的绝对干涉测量方案,提出以可调谐半导体激光器作为光源,采用可调合成波长链法实现纳米级精度毫米级量程的台阶高度测量,并详细分析了本方案的原理、误差。

In this paper, several non-contact optical methods of measurement of step height are introduced in brief, and the absolute distance interferometry with diode laser is emphasized hereinto. We conceive a CSWC ADI system with tunable diode laser to measure the step height in nanometer scale, and analyze the theoretic uncertainty of the experiment.