SnO_2气敏元件敏感性能的研究

Study on the Sensibility Characteristics of SnO_2 Gas Sensors

为了探讨具有优良性能的SnO2气敏元件的研制方法,依据半导体晶界气敏理论,以SnO2为基体材料,采用烧结型工艺和溶胶-凝胶方法制备出了气敏器件,并对该元件的气敏特性进行了测试.结果表明,采用溶胶-凝胶方法制备的气敏元件具有较高的灵敏度和低电阻等特点,对氢气响应时间可以达到5s.

In order to discuss the preparation of high - performance SnO2 gas sensors, according to the gas sensibility theory of semiconductor grain boundary the gas sensor has been prepared by using of sinter process and sol - gel with the substrate material Sn02, and the sensibility characteristics of it have been tested. The results show that gas sensors prepared by using of sol - gel have not only the higher sensibility but also lower resistance, and the response time to H2 gets to 5s.