AFM以纳米管针尖测量纳米尺度线宽的研究

Research on Nano-scale Linewidth Measurement by AFM with Nanotube Tip

针对原子力显微镜(AFM)以纳米管针尖在轻敲模式下测量纳米尺度线宽的问题,依据振动学和数学形态学理论,提出了微悬臂的振动模型,描述了针尖振动轨迹,并仿真了不同条件下测量标准样品所得图像.仿真结果表明:纳米管轮廓和振动都使线宽测量结果产生膨胀,因而无法获得双侧边墙都很好的测量结果,而要得到较好的单侧边墙,应选用纳米管尖端偏向微悬臂夹紧端的针尖.

To solve the question that measuring nano -scale linewidth by atomic force microscope with nanotube tip at tapping mode, the vibration model of micro - cantilever is proposed, the vibration tip top＇ s track is described and the images by measuring standard sample under different conditions are simulated according as mechanical vibration and mathematical morphology. The simulation results show that the measurement results are dilated by nanatube profile and tip top＇ s track. So that it is impossible to acquire good measurement results of both sidewalls. To get good measurement result of single sidewall, the nanotube whose top partial to micro - cantilever clamped end is needed.