摘要
提出一种基于SOI材料的超紧凑型3×3 MMI波导光开关,开关仅有一个多模波导,且多模波导采用更为紧凑的双曲结构。用FD-BPM方法对其各个状态进行了模拟和分析,并对器件的结构参数进行了优化设计。结果表明,这种光开关可以成功实现任意两输入和输出通道间的开关功能,优化后的开关呈现优良的综合性能,且整个器件的尺寸小于4 mm。
Ultra-compact 3 ～ 3 SOI multimode interference （MMI） optical switches were presented. There is only one hyperbolic multimode waveguide in the switch. The various states of the switches were simulated and analyzed using the finite difference beam propagation method （FD-BPM） ,the structure parameters of the switch were also designed and optimized. The results show that the switch can realize on-and off-function between any pair of input and output channels. The optimized switch has excellent properties, and the whole size of the switch is less than 4 mm.
出处
《半导体光电》
EI
CAS
CSCD
北大核心
2005年第4期294-298,共5页
Semiconductor Optoelectronics
关键词
多模干涉耦合器
光开关
SOI
区域调制
双曲结构
multimode interference coupler
optical switch
SOI, area modulation
hyperbolic structure
