微机械电容式加速度传感器信号电路设计

Signal Circuit Design For Micro Machined Capacitance Accelerometer

介绍了一种可用于差动电容敏感的加速度传感器的信号检测电路,给出了在电路中所用的电子元器件,同时进行分析,得到电路的输出电压和传感器信号电容变化量之间的关系。实验结果表明,该电路的线性高,测量差分电容变化的灵敏度好,是一种具有实用价值的微差分电容测量接口电路。

A new signal pickup circuit of dynam sensor activated by differential capacitance is introduced and electronic components used in the circuit are listed. At the same time, the connection between output voltage and capacitance variation is obtained through analyzing. It indicates that the circuit has a high liner and its sensitivity for measuring differential capacitance is all right while the circuit was used in a micro capacitive accelerometer with practical value.