无磨料低温抛光中的振动分析及消除

Vibration analysis and elimination for cryogenic polishing without abrasives

针对无磨料低温抛光中冰盘会出现倾斜、引起加工过程的振动问题,对冰盘与工件盘的水平面内的相对运动进行了分析。对冰盘倾斜时,工件盘的纵向运动进行了建模,得到了冰盘与工件盘的偏心及冰盘的倾角越大,振动的幅值越大的影响规律,提出了抛光前对冰盘进行修整来消除振动的解决方案。通过对石英晶体的抛光实验,证实了这种方法的可行性,最终达到了粗糙度为0.53nm的超光滑表面。

The slope of the ice disk surface used for cryogenic polishing without abrasives results in vibrations during the polishing. The vibrations were studying by analyzing the relative horizontal motion between the ice disk and the workpiece to model the workpiece longitudinal motion. The results show that the vibration increases as the slope and the offset between the ice disk and the workpiece increase. Therefore, the ice disk must be modified before polishing to decrease or even eliminate the vibration. Experiments on a quart crystal created a supersmooth surface with 0. 53 nm roughness.