摘要
为研制大行程高精度进给机构,基于蠕动运动原理,以超磁致伸缩微驱动器为驱动元件、嵌入柔性铰链中的压电陶瓷驱动器与V形导轨配合为箝位方式,研制了超磁致伸缩压电直线式蠕动机构样机,并利用计算机对其运动进行了闭环反馈控制。运行测试结果表明,该机构能够稳定地蠕动步进和后退,位移重复定位精度可以达到±15nm。
A linear inchworm mechanism was developed with a magnetostrictive actuator and two piezoelectric translators fixed in a specially designed flexible frame to provide both long travel range and high positioning precision. The mechanism movement is controlled by a closed-loop feed back algorithm using a high precision length gauge as the transducer. Test results indicate that the mechanism reliably moves forward and backward with a positioning accuracy of up to ±15 nm.
出处
《清华大学学报（自然科学版）》
EI
CAS
CSCD
北大核心
2005年第8期1055-1057,1061,共4页
Journal of Tsinghua University(Science and Technology)
基金
国家"八六三"高技术项目(2002AA23240)
关键词
蠕动机构
磁致伸缩
压电
inchworm mechanism
magnetostrictive
piezoelectric
