AZ4903光刻胶在微电机定子绕组制作中的应用

Application of AZ4903 to the production of micromotor's stator windings

为满足电磁型平面微电机对定子绕组线圈的高深宽比及厚度要求,提出一种利用AZ4903光刻胶制作电磁平面微电机定子绕组的方法。通过反复摸索,得到了该光刻胶的较理想的转速胶膜厚度、前烘时间温度的关系曲线及合适的曝光、显影时间。制作出了厚度为40μm、陡直度良好的定子绕组线圈。把利用该工艺制作的定子绕组和转子装配后形成了微电机,通过对该电机转速和输出力矩的测试结果表明,电机运转平稳、力矩波动小。

Electromagnetic planar micromotors were produced using AZ4903 with high depth-width ratios and thicknesses of the planar micromotor＇s stator windings. The production method can optimize the coating thickness as a function of the relational speed and the prebaking time as a function of the operating temperature. The optimal lithography and developing times are also given. A winding thickness of 40μm gives the ideal perpendicularity. Tests of the rotational speeds and pull-out torque of the micromotors show that the micromotor works at steady speeds with little ripple of the pull-out torque.