基于机器微视觉的MEMS平面微运动测试技术(英文)

Measurement Technique of In-plane Motion for MEMS Based on Machine Micro-vision

随着微电子机械系统(MEMS)研究的深入和产业化的需求,检测技术在MEMS中的重要性越来越大。基于机器微视觉原理组建MEMS动态测试系统,在此系统之上,提出模糊图像合成技术对MEMS器件的平面微运动特性如谐振器的运动幅度、谐振频率等重要参数进行了测试,给出了测量结果,并对测试结果进行了分析和讨论。

Testing technique is more and more important as MEMS steps into industrialization. One testing system to characterize dynamic microstructures based on computer micro vision technique is designed. Based on this system a new method for characterizing the Performance of MEMS is described. That is the technique of blur image synthesis. On the basis of this technique motion characteristics of MEMS micro-resonator such as motion amplitude and resonant frequency are described. Results obtained using these methods are discussed.