摘要
采用微加工技术研制了一种以硅为基底材料,具有MEMS结构的氧传感器。阐述了该传感器的工作原理、结构设计、工艺流程以及特性分析。给出了溅射制备TiO2薄膜的方法及锐钛矿型晶体结构能谱,讨论了二氧化钛的氧敏机理。研究表明与传统的气体传感器相比,此种传感器具有体积小、低功耗、可集成的特点。
An oxygen sensor on silicon substrate was fabricated by microelectronic mechanical system technology. Its operation principle,design and technological process were described. The oxygen sensitive filmtitania thin film was formed by magnetron sputtering. From XRD spectrum the structure of the film was anatase. Experiment results confirmed with the oxygen-sensitive mechanism of the sensor. The recovery and response characteristic and oxygen sensitivity curves of the sensor were given out.
出处
《传感技术学报》
CAS
CSCD
北大核心
2005年第3期531-533,共3页
Chinese Journal of Sensors and Actuators
基金
教育部资助项目(204047)
