用浮动零点法消除温度对SAW加速度计测量准确度的影响

On the New SAW Accelerometer with Floating Zero

分析了温度漂移对声表面波谐振器(SAWR)及其声表面波振荡器(SAWO)频率特性、以及对SAW加速度计测量准确性的影响,探讨了提高SAW加速度计测量准确度的方法,提出了一种基于浮动零点原理抑制温度共模干扰的双对SAWR加速度计设计方案。本方案不仅通过设置浮动零点SAWR抑制了SAWO频率-温度漂移对SAW加速度计测量准确度的干扰,还在一定程度上降低了对SAWR表面制造工艺的要求。

The frequency characteristic of surface acoustic wave resonator （SAWR） and its oscillator （SAWO） are under the influence of their surrounding temperature and temperature-shift. After this physical phenomenon was analyzed, a new SAW accelerometer with 4-SAWR based on floating zero principle is put forward theoretically. The elementary method to increase measure-accuracy and precision of the SAW accelerometer is for reducing temperature influence to set up a floating zero SAWR which has same temperature frequency characteristic as the measuring SAWR. Another advantage of the new structure of SAW accelerometer is reducing technological requirement to the SAWR.