基于AFM的微位移测量新方法研究

A new method for micro-displacement measurement based on atomic force microscopy

提出了一种测量物体微位移的新方法。原子力显微镜作为测量工具,样品和扫描器置于待测物体上,物体每移动一定距离就由AFM扫描获得一幅样品图像,由此获得一系列连续的序列图像。采用模板匹配方法检测相邻序列图像的偏移,从而可计算出物体的微位移。实验结果表明,用该方法还可实现物体二维方向的微位移测量,且精度达到纳米量级。

A new method for micro-displacement measurement is presented. Atomic force microscope （AFM） acts as a measuring tool, with a reference sample and a XY scanner put on the object whose micro-displacement is to be measured. After the first image is scanned, the sample and XY scanner together with the object are moved in the X or Y direction for a short range and the second image is acquired by activating the scanner. In this way, a series of images can be successively obtained. The displacement of adjacent images can be obtained according to the method of registration techniques, and then the micro-displacement of the object can be easily counted. The experiment results show that the method also can be used to measure in two-dimension, and the measuring precision has reached nanometer scale.