光刻技术在流体动力密封研究中的应用

Application of photoetching to liquid hydrodynamic seal

主要介绍了流体动力密封螺旋槽动环光刻工艺的特点、原理、工艺过程、工艺流程、槽深控制方法以及应用情况,提出了采用高能束流刻蚀螺旋槽动环的新途径。结果表明,采用标准MEMS光刻工艺技术和化学铣切工艺技术,可加工出满足设计要求的螺旋槽动环。

This paper introduced principle, process, characteristics and controlling deep slot of spiral groove movable ring of photoetching in the liquid hydrodynamic seal. The new method of high-energy ions etching spiral groove movable ring was put forward. Test results show that the design requirements of the spiral groove movable ring can be met with MEMS and chemical milling technology.