摘要
本文对光学薄膜淀积过程中真空室的真空环境对薄膜激光损伤的影响作了理论与实验方面的分析。对分子泵、扩散泵真空系统及扩散泵＋离子束辅助淀积（IAD）制备出的膜系样品所进行的损伤实验表明，分子泵系统制备出的薄膜显示出较高的损伤阈值。
The effect of vacuum enviroment in the vacuum chamber during the depositionof optical coatings on laser induced damage threshold (LIDT) of films is analysed. Damage measurementsto samples produced by vacuum system of molecule pump,diffusion pump and diffusionpump plus IAD technology seperately show that films produced by molecule pump displaythe most high LIDT value.
出处
《光电子技术》
CAS
1996年第1期38-41,共4页
Optoelectronic Technology
