摘要
采用ＫｒＦ准分子激光对ＳｒＴｉＯ３和Ａｌ２Ｏ３陶瓷进行刻蚀。给出了刻蚀速率与激光能量密度的关系，并对实验结果进行了分析。
KrF excimer laser (248nm) was used to ablation the SrTiO3 and Al2O3 ceramic.The relationship between ablation rate and laser fluence was showed and the experimental results was analyzed.
出处
《应用激光》
CSCD
北大核心
1996年第2期77-78,共2页
Applied Laser
