铁催化薄膜的微观结构对碳纳米管阵列生长的影响

Influence of Microstructures of Fe Catalyst Film onGrowth of Aligned Carbon Nanotubes

本文利用热化学气相沉积法(TCVD),系统地研究了NH3预处理对硅基底上沉积的催化剂铁膜的结构及所制备的碳纳米管形态的影响。研究结果表明,利用氨气对硅基底上的催化剂铁膜进行适当的预处理不仅可以将催化剂颗粒细化,还可以使催化剂在碳纳米管的制备过程中保持较高的催化活性,促进分解出的活性碳原子在催化剂中扩散和析出,增强碳纳米管的成核和生长,从而合成出纯度较高、定向性好的碳纳米管阵列。

Aligned carbon nanotubes were synthesized on Si substrates deposited with 5-10nm Fe films using thermal chemical vapor deposition method,And the effects of NH3 pretreatment on Fe films and subsequent growth of carbon nanotubes were investigated. The results indicate that an appropriate time of NH3 pretreatment can not only etch Fe particles, but also promote the catalytic properties of Fe catalyst. Subsequently, high purity and well-aligned carbon nanotubes were obtained.