15—75nm波段室温干燥空气的光谱分辨XUV透过率测量

Measurement of the Spectral-Resolved XUV Transmission of Room-Temperatured Dry Air in the 15—75nm Band

以McPHERSON247型掠入射软射线-真空紫外单色仪配合5900Magnum通道电子倍增器,在室温下测量了不同压强下干燥空气的15—75nm波段光谱分辨极紫外辐射(XUV)透过率,单色仪理论光谱分辨率Δλ≤0.075nm,波长扫描间隔0.5nm,有效吸收长度100mm。测量结果与Henke等人的数据进行了对比。

The spectral-resolved XUV transmissions of room-temperatured dry air at various pressures were measured in the 15-75nm band by a 5900 Magnum CEM and a McPHERSON model 247 grazing incidence monochromator with a theoretical monochromator resolution of △λ≤0.075nm, a wavelength scanning interval of 0.5nm, and an effective absorbing length of 100mm. The experimental results were compared with the data given by Henke and co-workers.