摘要
分析了物理气相沉积(PVD)技术制备的类金刚石膜和掺杂金属的类金刚石膜的性能,并介绍了类金刚石膜在模具上的应用情况。
Both the properties of diamond-like carbon membrane made by physical vepour deposition (PVD) technology and the character of diamond-like carbon membrane of doping metals are analyzed separately, and the application of diamond-like carbon membrane in die is introduced.
出处
《模具制造》
2005年第9期54-56,共3页
Die & Mould Manufacture