喷雾式涂胶的新应用

New Applications for Spray Coating Technology

介绍了喷雾式涂胶(SprayCoating)的多种新应用。在形貌起伏很大的表面均匀地涂布光刻胶(抗蚀剂)是一项非常有挑战性的工作,喷雾式涂胶正是为了满足这个挑战而开发的。实践证明,与传统的旋涂技术相比,喷雾式涂胶可以在保持光刻胶均匀性良好的同时显著地节约光刻胶的用量。已经发现此技术可用于非圆形基片和多件基片同时涂布。此外,此技术也可以为脆弱的结构提供保护性涂胶以及悬空结构的填充。

This paper describes the various applications the have been discovered for the use of spray coating. This process was initially developed for the coating of substrates with challenging surface topographies, and for conformal coating of these topographies. It has been shown to provide significant material savings over standard spin coating processes, while maintaining favorable surface uniformity. It has also been discovered that the technology is of use for coating non-circular substrates and multiple substrates simultaneously. Additionally, spray coating has demonstrated the ability to effectively provide protective coating for delicate structures, and Underhill for suspended structures.