6Ⅱ Mizumoto, M Ya buya. A Summarized Comparison of Feed Drive Devices for Ultra-precision Positioning Systems. Preceding of the 8th International Precision Engineering Seminar, 1995.
7Chun Hong Park, Eung Sook Lee. A Review on Research in Ultra Precision Engineering at KIMM [ J ]. International Journal of Machine Tools & Manufacture, 1999, (9): 1793 ～ 1805.
8Mizumoto Hirosli, Nomura, K Matsubara T, et al. An Ultra-precision Positioning System Using a Twist Roller Friction Drive [J].Journal of the American Society for Precision Engineering, 1993,(15): 180～184.
3[1]Donaldson R R , Patterson S R. Design and Construction of a large, vertical axis diamond turning machine[R]. Lawrence Livermore National laboratory report.1985.
4[2]XinCUI,Tetsuya,et al.A Combination of Air-spindle and Permanent Magnetic Bearing for Improved Motion Accuracy and Stiffness[R]. MECHATRONICS'98.1998.
5[4]王宪平.超精密直线度误差分离技术与研究[D].国防科技大学硕士论文，1998.
6[8]A.Spies. Linear and Angular Encoders for the High-Resolution Range[A]. Proceedings of 9th IPES and 4th ICUME，1996:54.
7[9]Tomoyuki Takamoto Development of the High Sensitive Probe for Coordinate Measuring Machine[R]. MECHATRONICS'98 1998.
8[10]Bowen D K. Sub-hanometre transducer characterization by X-ray interferometry[J]. J. of Preeision Engineering， 1990，12（3）.
9[11]Gou J B , Chu Y X, Li Z X. Symmetric Localization and applications to form tolerance evaluation ASME[J]. J.of Manufacturing Science and Engineering，1997.
