摘要
针对工艺误差引起的频率不匹配问题,模拟设计一种基于体硅工艺的新型结构高灵敏度微机械陀螺,采用差分驱动有效克服了静电力分布不均匀对灵敏度的影响.通过对陀螺的结构性能进行有限元模拟分析,合理选择结构参数,驱动频率为5.200 kHz,敏感频率为5.187 kHz,匹配系数R≈0.25%.此结构既有效地消除了机械耦合,又使驱动模态与敏感模态匹配良好.
A kind of bulk micromachined gyroscope with novel structure and high sensitivity was simulated and designed. The differential drive eliminated the effect of asymmetric-electrostatic force distribution on the sensitivity. The structure dimensions of the gyroscope were optimized using finite element method （FEM）. The a- nalysis results obtained from simulation were that the driving mode frequency was 5. 200 kHz, the detecting mode frequency was 5. 187 kHz and the match coefficient R was approximatively 0. 25%. The mechanical coupling between the drive and detection modes of the gyroscope was eliminated, and the frequency mismatch was reduced by the structure.
出处
《哈尔滨工业大学学报》
EI
CAS
CSCD
北大核心
2005年第9期1196-1199,共4页
Journal of Harbin Institute of Technology
基金
航天创新基金资助项目(AQQ24409104).
关键词
微机械陀螺
有限元
耦合
micromachined gyroscope
FEM
coupling
