Ar离子辐照非晶态合金表面发泡和针孔形成研究

Study of Surface Blistering and Pinhole Formationon Argon Ion Bombarded Amorphous Alloys

１５０ｋｅＶ和１９５ｋｅＶＡｒ离子室温下辐照非晶态合金（Ｃｏ９４Ｆｅ４Ｃｒ２）７８Ｓｉ８Ｂ１４，表表面发泡和溅射腐蚀是两种主要的表面损伤过程．针孔出现较表面发泡要晚，它的密度随剂量增加迅速地增加，并且在一定的辐照剂量时趋向饱和，这时，一种多孔粗糙的表面损伤结构形成．针孔的形成影响了表面发泡，导致了发泡密度随剂量增加急剧地减小．用溅射和气泡破裂解释了针孔形成和在高剂量时趋向饱和的原因．

Amorphous alloy (Co94Fe4Cr2)78Si8B14 was bombarded with argon ions at energies of150keV and 195keV respectively. Above a critical fluence blistering and sputteringerosion were the two main surface damage phenomena. The critical fluence for onsetof pinhole formation was determined and found to increase with ion energy. Thedensity of pinhole increases with ion fluence dramatically and at a certain fluence, itreaches saturation. However, with the formation of pinhole, the density of blisterdecreases rapidly and a kind of porous structure is developed at a certain fluence.These results were interpreted with sputtering and rupture of bubbles.