摘要
介绍了利用激光直接光刻技术制作8相位台阶菲涅尔衍射微透镜列阵的工艺方法,并对元件的衍射效率及光刻过程中的制作误差进行了分析,透镜列阵在小形Shack-Hartmann波前传感器中得到了应用。
In the paper, the method for fabrication of diffractive microlens array using laser direct lithography system and reactive etching machine is described. The diffractive efficiency and the fabricating errors are analyzed. The microlens array has been used in a minature Shack Hartmann wavefront sensor.
出处
《光学学报》
EI
CAS
CSCD
北大核心
1996年第8期1194-1196,共3页
Acta Optica Sinica
关键词
激光
直接
光刻
微透镜列阵
衍射光学元件
laser direct lithography, microlens array, diffractive optical element.