水热处理对SnO_2厚膜气敏传感器性能的影响

The influences of hydrothermal treatment on the properties of SnO_2 thick film gas sensors

研究了水热处理对于SnO2厚膜气敏传感器性能的影响。为了便于作对比,首先把SnO2纳米粉(平均粒径约200nm)平均分为两份:一份不经处理,直接用传统的厚膜传感器制备工艺制成气敏传感器(称为“原粉传感器”);另一份经过200℃水热处理后,用同样的工艺制备成厚膜气敏传感器(称为“预处理粉传感器”)。利用乙醇、丙酮、CH4、H2和CO气体对这两种气敏传感器的性能进行了测试,结果表明预处理粉传感器的灵敏度和选择性明显优于原粉传感器。为了分析出现这种差异的原因,我们对这两种传感器的显微结构进行了分析,并在此基础上对实验现象进行了讨论。

In this paper, the effect of hydrothermal treatment on the gas sensing properties of SnO2 tguck-film gas sensors was studied. For comparison, SnO2 nanoparticles （with average particle size of 200nm） were divided into two aliquots： one aliquot was used as the material for the fabrication of thick-film gas sensors （denoted as ＂raw sensors＂）. The other aliquot was hydrothermally treated at 200℃, and then it was also used for fabricating the gas sensors （denoted as ＂pre-treated sensors＂）. The testing results of these two kinds of gas sensors to ethanol, acetone, CH4, H2 and CO gases indicated that both sensitivity and selectivity of the pre-treated sensors were obviously higher than those of the raw sensors. The difference in gas sensing properties between the two kinds of sensors was analyzed on the basis of TEM measurement.