测量微观不平度的90°相移激光干涉仪

Phase Quadrature Laser Interferometer for Measuring Microscopic Asperity

叙述了测量微观不平度的90°相移激光干涉仪的原理和构成。对这种新型干涉仪的性能及有关问题作了讨论。测量结果的计算和样品扫描的控制，由个人计算机完成。垂直分辨率达1um，横向分辨率达10μm。实验结果证明了系统的稳定性。

The principle and fabrication of the phase quadrature laser interferometer for measuring microscopic asPerity are described. The behavior of the novel interferometer and some problems are discussed.The calculation of the measured result and sample scanning in the interferometer is performed by a PC computer. Vertical resolution is 1 nm, and lateral resolution is 10 μm. The result shows the good stability of the system.