摘要
和传统的传感器相比,微型传感器具有许多新特性,它们能够弥补传统传感器的不足,具有广泛的应用前景,越来越受到重视。文中详细介绍了一些微型传感器件的结构和原理,说明了微型传感器的基本性能特点和微型传感器的发展趋势。
Compared with traditional sensors, microsensors have a lot of new characteristics, which more and more attract people＇s attention. By showing some kinds of microsensors, introduced the various structures and principles of these microsensors, described their excellent performance, and indicated the development trend of microsensors.
出处
《仪表技术与传感器》
CSCD
北大核心
2005年第9期4-5,12,共3页
Instrument Technique and Sensor
