摘要
通过室内的粉尘浓度,即重视清净度的LCD制造工厂为研究场所,使用垂直层流方式的产业用洁净室(I.C.R:IndustrialCleanRoom)内进行现场实测与数据分析,得出结论:第一,证明现有的现场条件与洁净室的环境数据分析结果相同;第二,找出给气流变化重大影响的因素,掌握它们的特性;第三,为保持最适用的洁净室,对气流变化的预测提供基础资料。
This research is aimed at presenting the basic data for predicting the airflow change by means of on-the-spot measurement in the Industrial Clean Room, where dust particles are controlled by the extremely low density and a high degree of cleanliness is maintained, and numerical simulation. The research results are as follows：
出处
《洁净与空调技术》
2005年第3期1-6,11,共7页
Contamination Control & Air-Conditioning Technology
