中波红外8通道微型集成滤光片的研制

Fabrication of Mid-Infrared 8-Channel Micro Integrated Filter

利用组合刻蚀法布里珀罗(F-P)干涉滤光片的谐振腔间隔层的方法,制备了集成在一个基片上的8通道中波红外(0λ=2.8μm)窄带滤光片,通道线宽为0.7 mm,光谱通道定位精度优于1%,各通道相对半峰宽为1%.此法有效提高了成品率,并可满足实现通道数更多,集成度更高的滤光器件发展的需求.

Integration is the trend of multi-channel filter in imaging spectrum system,which is called mirco filters. Adjusting the center layer of F-P filter is an effective method to fabricate multi-channel filters. Because of limitation of usual optical coating technology, so the yield of integrating all channel in single substrate is very low. A new method is developed to solve this problem, which combines multi-time ion mask etching with tradition coating technique. As an example, an 8-channel micro integrated filter is fabricated,and optical channel position control accuracy is below 1%.