无移动部件微泵的设计、制造及基于微PIV技术的流动测量

Design,fabrication and micro-PIVmeasurement on no-moving-part micro-pump

基于简化微泵加工难度、延长寿命及特殊管道流体特性原理,设计了一种无移动部件微泵.通过数值计算对设计微泵进行优化.用特殊材料PDMS及微机械加工工艺制造出微泵.用微PIV粒子成像技术测量了微泵流场特性及流量.可实现在工作频率600～2000Hz下,微泵流量为0.01～0.1μL/8.

In order to simplify the fabrication process and prolong the working time of the micro-pump, the different kinds of no-moving-part micro-pumps were designed according to the flow characteristics of special tubes. The method of CFD was employed to optimize the micro-pump structures. The micro-pumps with the material PDMS were fabricated by mieromaehining processes. The miero-PIV technology was introduced to investigate the flow characteristics and measure the flow rate of the micro-pump. The micro-pump can transfer fluid in flow rate of 0.01 - 0. 1μL/s at the driving frequency of 600 - 2000Hz.