摘要
能量色散谱仪分辨率较低,本文提出了克服这一缺点的方法和措施,从而提高了能谱仪定性分析的可靠性.
A method of using smallest channel wide in energy dispersive spectrometer (EDS)analysis was introduced in this paper.This method can overcome the lack caused by lower resolution for EDS and increase the reliability of qualitative analysis with EDS.
关键词
能量色散谱仪
分辨率
多道分析器
道宽
X射线
s:Energy dispersive spectrometer
Resolution
Multichannel analyzer
Channel.