一种压电喷墨打印机喷头的动力学特性研究

Dynamic Characteristic Study of a Piezoelectric InkJet Print Head

为研究压电薄膜驱动的应用,介绍了一种MEMS压电喷墨打印机喷头的工作原理.重点研究了逆压电效应作用产生的机械振动特性.模型结构由一种耐热玻璃与沉积在其表面的压电薄膜复合而成.针对圆形、方形两种形状的压电薄膜,利用有限元分析软件ANSYS分别求得复合结构的最大静位移0.57 μm和0.36μm,一阶固有频率23.90 kHz和22.30 kHz,并比较了两种情况下的动力特性.仿真结果表明,所施加驱动交流电压的频率对该结构可产生很大的影响,其最大机械变形主要取决于谐振频率,从而为喷墨打印机喷头及类似器件的设计提供参考。

Working principle of a MEMS piezoelectric ink jet print head is introduced. This work is concentrated on its mechanical vibration behavior, which is induced by converse piezoelectric effect. The structure of the model consists of a layer of Pyrex and another layer of piezoelectric diaphragm deposited on its top. The maximum static deflections of this model are 0.57 μm and 0.36 μm, and natural frequencies are 23.90 kHz and 22.30 kHz. All these are calculated by finite element analysis software-ANSYS, and then the dynamic characteristics are compared in two eases respectively. The results of simulation indicate that the frequency of driving voltage applied exerts a profound effect on the model, and the mechanical deformation hinges on using resonance to generate sufficient motion of the piezoelectric layer, thus provides a method for optimizing the designs of inkjet print head and similar devices.