2Papapolymerou J, Cheng J, East J, et al. Amicromachined High-Q X-Band Resonator[J]. IEEE Microwave and Guided Wave Letters, 1997,7(6) : 168-170.
3Deslandes D and Wu K. Intrgrated Microstrip and Rectangular Waveguide in Planar Form [J]. IEEE Microwave and Guided Wave Letters, 2001,11 (2): 68-70.
4Wei Hong. Devdopment of Microwave Antermas, Components and Subystems Based on SIW Technology [C]//IEEE International Symposium on Microwave, Antenna, Propagation and EMC Technologies for Wireless Communications Proceedings,2005,14-17.
5Ketterl T, Weller T, and Fries D. A Micrornachined Tunable CPW Resonator[C]//IEEE MTT-S Digest, 2001: 345-348.
6Strohm K M, Schmuckle F J, Schauwecker B, et al. Silicon Micromachined RF MEMS Resonators[C]//IEEE MTT-S Digest[C], 2002: 1209-1212.
7Strohm K M, Schmuckle F J, Yaglioglu O, etal. 3D Silicon Micromachined RF Resonators[C]//IEEE MTT-S Digest, 2003:1801-1804.
8Zhu J, Yu Y, Lin L, el al. Micromachined Silicon Via-Holes and Interdigital Bandpass Filters[C]//Symposium on Design,Test, Integration and Package of MEMS/MOEMS (DTIP 2005), Montreux, Switzerland, 2005: 86-89.
