实时光学薄膜膜厚监控系统研究

Real-time Optical Thin Film Thickness Monitor System

在光电极值法基础上采用一定的信号采集方法、数据处理和极值点判断算法,通过硬件电路和高级程序语言设计了膜厚监控系统。实验表明,该系统能够对光学薄膜镀制过程进行实时在线跟踪,以及对膜层厚度的准确控制。

We present a kind of automatic thin-film monitor system design. Enhancing data acquisition resolution, using processing algorithm and the judgment approach of maximum value,we improved the performance of the thin-film monitor system based on photoelectric maximum theory. The thin film spectrum can be real-time monitored and the thickness can be controlled accurately. We realized the real-time monitor system in hardware circuits and advanced program. Monitoring results could reflect the conditions and film thickness during film coating.