摘要
用直流反应磁控溅射法制备了TiO2薄膜,并对热处理前后试样的紫外可见光谱(UV-Visspectrum)和荧光发射光谱(PLSpectrunm)做了研究。发现热处理后试样的紫外可见光谱在496nm处出现了一个较为明显的吸收峰,荧光发射光谱496.5nm处出现一个荧光发射带肩。X射线光电子能谱(XPS)的分析结果表明,热处理可使薄膜中晶格氧扩散出去,生成Ti3+离子和氧空位。结合XPS的分析结果和理论计算,可推断热处理后出现的位于496nm处的吸收峰和496.5nm处的荧光带肩可被指认为薄膜中Ti3+离子的d电子跃迁产生。
TiO2 films were prepared by dc reactive magnetron sputtering. The UV-Vis spectra and PL spectra of samples before and after heat treatment were studied in detail. An absorption peak （496 nm） in UV-Vis spectra and an emission shoulder （496.5 nm） in PL spectra are observed clearly. The analysis of X-ray photoelectron spectroscopy （XPS） indicates that the lattice oxygen can be removed by heat treatment to form the Ti^3＋ and oxygen vacancies. Taking the XPS analysis and theory calculation into consideration together, it can be concluded that the absorption peak （496 nm） in UV-Vis spectra and the emission shoulder （496.5 nm） in PL spectra are attributed to the d-electron transition of Ti^3＋ in TiO2 films.
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2005年第9期1451-1454,共4页
Rare Metal Materials and Engineering
基金
国家"863"项目(2003lg0034)
关键词
热处理
二氧化钛
紫外可见光谱
荧光光谱
heat treatment
titanium dioxide
UV-visible spectra
PL spectra
