有源静电悬浮系统的变预载控制

Active Electrostatic Suspension Systems with Adaptive Preload Control

在基于静电悬浮轴承的惯性仪表中,为了保证系统的承载能力,需要选取很高的预载电压;而为了提高惯性仪表的精度,希望选取较低的预载电压以减小电场干扰力矩。为解决此问题提出了一种固定低预载与连续变预载相结合的控制方案,通过将被控对象精确反馈线性化和增益补偿后,能够保证系统性能基本不受预载电压变化的影响。实验表明,系统的预载电压降低了56.7%,高压放大器的功耗降低了45.3%。

High preload voltage is necessary to ensure adequate load capacity for electrostatic suspension with fixed preload while low preload is desirable to reduce electrostatic disturbance torques for high-precision inertial instrument systems. In response to this problem, an adaptive variable preload control operating at a low fixed preload for nominal operational conditions and successive variable preload when necessary is developed and its performance is examined. The consistent performance is obtained despite the change of preload voltage by com- bining feedback linearization of the plant and compensation of the system gain. The experimental results for variable preload operation show that the preload voltage and the power consumption of high-voltage amplifiers are decreased by 56.7% and 45. 3% respectively by compared with that of the conventional fixed preload scheme.