摘要
光学镀膜宽带监控的判停依靠测量曲线和理论曲线的吻合程度来进行,这要求对理论曲线进行符合薄膜镀制实际的修正。在介绍光学镀膜宽带监控技术的原理及现状的基础上,针对由于材料的吸收而产生的测量曲线和理论曲线的严重背离,提出了一种逐层修正的方法。试验结果表明,其效果良好,完全可以满足实际镀膜的需要。
Termination of optical coating wideband monitoring depends on overlapping stage of the theoretical curve and the measured curve, which requires that the theoretical curve is corrected in order to agree with practical deposition process. The principle and the present state of optical coating wideband monitoring technology were introduced. Based on the absorption of thin-film material resulting in heavy divergence between the theoretical curve and the measured curve, a method of layer-by-layer correction was put forward. By experiment, the result indicated that this method can satisfy the practical deposition requirement sufficiently.
出处
《光学技术》
EI
CAS
CSCD
北大核心
2005年第5期672-674,678,共4页
Optical Technique
基金
"十五"预研第一批兵器支撑基金项目(YJ0267051)
陕西省教育厅产业化项目(03JC28)
关键词
镀膜
宽带监控
吸收
逐层修正
coating
wideband monitoring
absorption
layer-by-layer correction
