摘要
应用光衍射理论分析了一种纳米级位移分辨率的双级衍射光栅测量系统,建立了衍射莫尔信号与对应位移的数学模型,并通过计算机仿真对莫尔信号的位移特性进行了研究。在此基础上构建了一套精密位移测量与控制装置,取差动零次激光莫尔信号为控制信号,由微机控制实现高精度位移检测及全自动精密定位。实验结果表明,基于激光莫尔信号的精密检测与控制装置可获得得5nm的位移分辨率及±0.4μm的定位精度。
A double-grating displacement measurement system with the resolution of nanometer order was analyzed using diffractive theory. A mathematic model of the double-grating displacement measurement was established. The characteristics of laser moiré signals was studied by numerical simulation of moiré signals. A precision measuring and positioning device based on diffraction gratings was designed . The device achieved precision displacement measurement and automatic precision alignment using computer controlled moiré technique. The experimental result shows that the apparatus based on moiré signal can achieve the resolution of 5um and plane positioning accuracy of ± 0.4μm.
出处
《光学技术》
CAS
CSCD
北大核心
2005年第5期701-703,共3页
Optical Technique
基金
江苏省高校自然科学基金资助项目(04KJB510073)
关键词
光学测量
莫尔信号
精密定位
自动控制
optical measurement
moir6 signals
precision alignment
automatic control
