O_2非平衡态等离子体中电子平均能量的谱线监测

Determination of Mean Electron Energy in O_2 Non-Equilibrium Plasma by Relative Spectrum Line Intensity

采用蒙特卡罗方法,模拟了O2非平衡态直流放电等离子体过程。计算了不同E/N条件下电子在氧气中的漂移速度,结果与实验数据符合得很好。模拟了电子平均能量和电子激发态粒子数随E/N的变化关系。提出了一种通过监测两条紫外谱线202.6和280nm强度之比来监测电子平均能量的方法。该方法对于非平衡态气体放电等离子体在材料制备、激光应用及微电子技术等领域中的应用具有重要意义。

The process of O2 non-equilibrium plasma is simulated by Monte Carlo method. The electron drift velocity as a function of E/N is given, which is in good agreement with experimental result. The variations of mean electron energy and the number density of electronic excitation states of O2 with the reduced field E/N are simulated. A method to determine the mean electron energy by relative spectrum line intensity is proposed, which is of great importance to the applications of non-equilibrium plasma in many fields such as material preparation, laser application, micro-electronics technology and so on.