摘要
报道了40Gb/sPIN波导型光探测器联体式管芯的设计与制作。通过光刻、化学腐蚀、电子束蒸发、增强型化学汽相淀积、金属剥离、解理等工艺技术,制作了40Gb/sPIN波导型光探测器管芯。
The design of the dies of 40Gb/s PIN wave-guide photo-detectors with a linked-body type have been reported in this paper. The dies of 40Gb/s PIN Wave-guide Photodetectors have been fabricated used the technologies of the photography, chemical etching, reaction-ion etching （RIE）,electron-beam evaporation, PECVD,film-plating, final optical fiber couple,etc..
出处
《光通信技术》
CSCD
北大核心
2005年第10期4-7,共4页
Optical Communication Technology
