摘要
介绍了一种以保持杠杆处于平衡位置为测量前提,以衍射光栅干涉位移传感器为位移测量系统的表面轮廓综合测量仪.重点论述了该仪器的整体结构,测量原理,以及衍射光栅干涉位移测量系统的工作原理.
A surface profilometer based on the grating interference displacement sensor achieving the mersurement of displacement is presented. The premise of measurement is to keep the lever at it＇s balance site. The discussion is focused on the structure and the measuring principle of the profilometer.
出处
《湖北工业大学学报》
2005年第5期125-127,共3页
Journal of Hubei University of Technology
