梯度煅烧对PZT铁电薄膜表面形貌的影响

Influence of Gradient Firing on the Microstructure of PZT Ferroelectric Thin Film

研究了通过梯度煅烧制度改善薄膜开裂问题的方法和机理。实验在A l2O3基片上采用溶胶-凝胶(So l-G e l)法制备了PZT铁电薄膜,发现薄膜的开裂程度随预烧制度的不同而存在明显的差别。结果表明,通过选择薄膜的预烧温度,使各个薄膜层的预烧温度呈梯度分布,可减小薄膜中的应力,从而改善薄膜的开裂情况。

In this paper, the new method and mechanism of gradient firing was studied for improving the microstructure of thin film. PZT thin film was prepared by Sol-Gel method on Al2O3 substrate. The resuh shows that the cracks are changing in films prepared by different firing method. By gradient firing, the stress is reduced in the thin film, and the microstructure of PZT film is improving largely.