摘要
对Φ200mm太阳能CZSi单晶生长的传统热场进行了改进,施加了复合式热屏.对改进前后热场温度梯度、单晶氧含量进行了实验分析,并对该系统的氩气流场进行了数值模拟.研究了复合式热屏影响拉速和单晶氧含量的机理.实验表明本文采用的复合式热屏和氩气流场可以提高拉速,降低硅单晶氧含量.
The conventional hot zone of a φ200mm CZSi is modified,and a compound heat shield is installed. An experimental analysis is carried out concerning the temperature gradient of the hot zone and the oxygen concentration of single crystals. Numerical simulation of Argon gas flow is made. The influence of the compound heat shield to the pull speed and the oxygen concentration is researched. The experiments show that the compound heat shield can increase the pull speed and reduce the oxygen concentration in a single crystal.
关键词
热屏
氧含量
温度梯度
拉速
heat shield
oxygen concentration
temperature gradient
pull speed
