摘要
在分析pnp隔离的逆导型GCT(RCGCT)特性的基础上,提出了沟槽隔离的RCGCT新结构,并给出了其阻断特性的设计方法.依此建立了RCGCT的结构模型,利用MEDICI软件对其阻断特性进行了模拟,并与非对称GCT和pnp隔离的RCGCT的阻断特性进行了比较和分析.另外,通过对不同沟槽结构参数下RCGCT的阻断特性和门极击穿特性的模拟,给出了沟槽区的优化参数.实验结果证明了设计的合理性.
The blocking characteristic of a conventional RC-GCT with pnp separation region is analyzed. A new RC-GCT structure with trench separation region is presented and the design considerations of its blocking characteristic are given. Based on the results, the structural model of RC-GCT with trench separation region is set up, and its blocking characteristic is simulated u- sing a MEDICI simulator and compared with that of the asymmetry GCT without separation region and RC-GCT with pnp separation region. In addition,the optimum parameters of trench separation region are given by simulating characteristics of the RCGCT for various trench structural parameters. The experiment results show that the design for the RC-GCT is reasonable.
基金
陕西省教育厅专项科研计划资助项目(批准号:04JK245)~~
