基于悬臂梁阀的微型压电泵的实验研究

Experimental Research on Piezoelectric Micro-Pump Using Cantilever Check Valve

利用压电晶片致动式压电泵的工作原理,提出一种整机采用迭片式结构,单向阀采用悬臂梁式薄片阀的新结构微型压电泵,设计、制作了实验样机,并对该泵的工作性能进行了较为系统的实验测试和研究,并提出了利用多腔体串联结构提高压电泵性能的优化设计方案。通过实验测试:该泵工作性能稳定,整机具有较高的体积功能比(样机尺寸:15 mm×1.8 mm;50 V正弦信号输入,80 Hz条件下,最大输出压力22 kPa,流量达到3.6 m l/m in)。该泵的设计方法及所用制作工艺对研发适于大量生产的实用微型泵是一个有益的尝试。

Based on the working principle of the micro-pump actuated by the piezoelectric wafer, this paper introduces a piezoelectric micro-pump with the new structure based on the lamination, which adopts the cantilever check valve. In the laboratory the prototype pump has been designed and manufactured, the systematic experiment research has also been done, and the optimization scheme has been put forward, which adopted the muti-chamber series connection structure to improve the performance of the micropump. Through a series of experiments and tests, we draw the following conclusion： the micro-pump possesses the stable work performance and has higher ratio of performance to volume（ the apparent dimension of pump：φ15 mm × 1.8 mm; the maximal low rate and backpressure of the micro-pump are about 3.5 ml/min and 22 kPa when applying 50 V sine wave driving voltage at 150 Hz）. The structure and manufacture processing is useful to the design and development of the applied piezoelectric micro-pump which is suitable for mass fabrication.