摘要
采用椭偏法测量类金刚石(DLC)薄膜的光学常数,分析了DLC薄膜折射率分布情况,提出了DLC薄膜折射率呈渐变分布的概念,建立了采用椭偏法进行DLC薄膜光学常数测量的多层物理模型,分析讨论了实验方法的可行性和测量结果的可靠性.实验结果表明:采用该模型进行DLC薄膜光学常数的测量,使拟合误差(MSE)从31.71下降到1.125,提高了测量精度.
The measure method concerning DLC film＇s optical constant by spectroscopic ellipsometer is studied in this paper. The distribution of DLC film＇s refractive index has been analyzed and the physical model applying to measure the refraction index of DLC film has been given. The optical constant of DLC film using this model is tested. The feasibility of this method and the reliability of measure result are dis cussed. The DLC film＇s optical constant is tested by the model. It makes MSE reduced from 31.71 to 1. 125.
出处
《武汉大学学报（理学版）》
CAS
CSCD
北大核心
2005年第5期574-578,共5页
Journal of Wuhan University:Natural Science Edition
基金
国家总装备部基金资助项目(编辑:略)
陕西省教育厅基金资助项目(04JK196)
