SnO_2-ZnO复合膜特性研究

Characterastic investigation of SnO_2-ZnO thin film

用真空蒸发的方法,在1.33×10-3Pa的真空中,蒸发SnO2,ZnO获得超微粒结构的SnO2-ZnO复合膜。当复合膜中ZnO质量分数为20%时,SnO2-ZnO复合膜对乙醇气体的灵敏度为40,膜的方电阻值也较低,为0.01×103Ω/□。复合膜经热处理后,其电学性能也得到改善,当温度t=600℃时,ZnO质量分数为20%的SnO2-ZnO复合膜热处理后,其膜对乙醇气体有较高的选择性,灵敏度为60。当t=400℃时,对掺有Sb2O5质量分数为450×10-6,ZnO质量分数为20%的SnO2-ZnO复合膜进行热处理,其方电阻仅为0.003×103Ω/□,具有优良的导电性能。

The ultra-fineness structure SnO2-ZnO films have been obtained by using vacuum evaporation method to evaporate SnO2-ZnO ceramics and dope in the 1.33 × 10^-3 Pa vacuum chamber. It is found that when quality fraction of the ZnO is 20%, sensitivity of SnO2-ZnO film is 40 to alcohol gas, and it exhibits a low resistance （0.01 × 10^3^3Ω/□）. Electricity performance of the SnO2-ZnO thin film through 600℃ heat treatment is improved, and quality fraction of ZnO is 20% quality. It has 60 high sensitivity to alcohol gas,and through doping Sb2O5 of 450 × 10^-6 quality fractior, ZnO of 20% quality fraction and 400℃ heat treatment, the SnO2-ZnO thin film exhibits a low resistance（0.003×10^3^3Ω/□） and fine electric conductivity.