MOS触发器型集成压力传感器

An MOS Flip-Flop Pressure Sensor IC

触发器型压力传感器具有灵敏度高、压力测量线性范围可调和能输出数字量等特点。论述了这类新型传感器的工作原理和特性，并重点分析了噪声对传感器特性的影响。为了改善传感器的特性，实验采用三角波调控电压，可以有效地调节传感器的测量灵敏度和线性范围。

A flip-flop pressure sensor has been fabricated using IC process combined with micromachining technology,which has a high sensitivity,adjustable sensing linearity and digital output capability. The working principle of the novel sensor is described, with emphasis on the analysis of the noise effect on its characteristics. A triangular-wave voltage, which can effectively adjust the sensitivity and linearity range, has been chosen to improve the performance of the sensor.