反应等离子体中尘埃空洞形成的实验研究

Investigation of void in dust clouds in reactive plasma

利用气体合成(乙烯和硅烷,氩气是载气)的方法,产生尘埃粒子,并在此基础上研究了悬浮在射频等离子体鞘层上方的尘埃云及尘埃空洞.实验结果给出了尘埃云和尘埃空洞与射频功率和气压等参数的关系曲线.

The void in the sheath of a radio-frequency（rf） dusty plasma is investigated experimentally. Dust particles in our experiment are created in situ using mixed reactive gases silane and ethane. Dust particles in radio frequency discharges form crystalline structure and display instabilities under certain conditions. The behaviour of the dust void as a function of rf power and gas pressure is studied.