摘要
阐述了光刻伺服盘媒体微细加工实验过程，分析了刻蚀工艺中影响磁盘光刻图形的不利因素，实践证明利用半导体微细加工技术光刻伺服盘，能大幅度提高磁道密度，增加磁盘驱动器的容量。
In this paper we explored the experiment process of media microfabrication of Etched Servo Disk and then unalyzed the disadvantages influence the etched graph in etching technique.Practices have proved that with the Etched Servo Disk made through the technique of semiconductor microfabrication. The truck density and then the capacity of Magnetic Disk Driver can be improved greatly.That is an advenced and practica way.
基金
国家自然科学基金重点项目
关键词
光刻伺服盘
刻蚀
微细加工
磁盘存储器
媒体
etched servo
disk etching technique
track density
microfabrication
